发明名称 Optical filter thin layer deposition method having thin deposition layers several substrates deposited and luminous beams produced optically controlling substrate thickness
摘要 The deposition mechanism (27) deposits thin layers (35,36) on several substrates (10,11). Luminous beams (31,31a,31b, 32a) are produced providing optical substrate thickness control.
申请公布号 FR2816714(A1) 申请公布日期 2002.05.17
申请号 FR20000014775 申请日期 2000.11.16
申请人 SHAKTICOM 发明人 GREZES BESSET CATHERINE
分类号 C23C14/54 主分类号 C23C14/54
代理机构 代理人
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