| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device capable of detecting a defect of an aperture grill, which has been performed by a complicated visual inspection by an inspecting person, in relatively simple structure and operation. SOLUTION: This inspecting device comprises a lighting means for radiating light to one direction of the aperture grill 1, an image pickup device 20 that is disposed on the other side of the aperture grill and photographs a transparent illumination image of the aperture grill from a direction tilting with respect to the aperture grill surface in a place orthogonal to the longitudinal direction of a through hole of the aperture grill, a moving means for moving the aperture grill in the longitudinal direction of the through hole, and an image processing device 22 for detecting a micro defect based on the image data provided by the image pickup device.
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