| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensing device and a sensing method in a turbo pump driving state in the tendetron accelerator of a semiconductor ion injecting device, which sense the driving state of the turbo pump forming a vacuum state, in the accelerating ion beam of the accelerator for injecting the desired ions on a semiconductor wafer. SOLUTION: The sensing device of the turbo pump driving state in the tendetron accelerator of the semiconductor ion injecting device is provided with a current detecting part 52 sensing current applied to the turbo pump 48 in the tendetron accelerator, an electric-light converter 54 converting current sensed by the current detecting part 52 into a light signal and outputting it, a photoelectric converter 58 receiving the light signal outputted from the electric-light converter 54 through a light cable 56 and converting it into an electrical signal and a display part 64 displaying the drive current of the turbo pump 48, which is outputted through the photoelectric converter 58. |
