| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inner diffusion layer in which most of recessed grooves are asymmetric. SOLUTION: A control means 10 for the transmittance of light is disposed in the exitation light side of a condenser lens 6 in a batch type proximity gap exposure device 1, so that the energy distribution of the light passing through the aperture of a photomask 7 and irradiating a photosensitive resin 9 is made to deviate. |
