发明名称 METHOD AND DEVICE FOR GROWING LIQUID PHASE
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for producing the device of proper quality, when producing the large area device, and to provide a liquid phase growing device used for the same. SOLUTION: The trap of a granular or needle-like solid material is arranged at the tip of a susceptor immersed in metal solution (indium solution). The floating solid material is fully removed, and a substrate is immersed in metal solution, and then a semiconductor thin film is grown on the substrate.</p>
申请公布号 JP2002141295(A) 申请公布日期 2002.05.17
申请号 JP20000333056 申请日期 2000.10.31
申请人 CANON INC 发明人 SAITO TETSUO;IWAGAMI MAKOTO;SHOJI TATSUMI;MIZUTANI MASAKI;YOSHINO TOSHIHITO;IWANE MASAAKI;NISHIDA AKIYUKI;UKIYO NORITAKA
分类号 C30B19/02;H01L21/208;H01L31/04;(IPC1-7):H01L21/208 主分类号 C30B19/02
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