| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thin-film resistor, which is high in stability of properties related to temperature such as temperature coefficient or the like, easily increased in resistance, and manufactured by a low cost apparatus, and to provide a method of manufacturing the same. SOLUTION: A metal thin-film resistor 21a is arranged on the surface of a board 11 for the formation of a thin-film resistor, in which the metal thin-film resistor 21a is formed of material composed of chrome, silicon, and valve metal or transition metal.</p> |
