MICROSCOPE AND METHOD FOR MEASURING SURFACE TOPOGRAPHY IN A QUANTITATIVE AND OPTICAL MANNER

摘要

The invention relates to a microscope and a method for measuring the surface topography of a workpiece in a quantitative and optical manner. Said invention is characterised by a differential interference contrast microscope embodiment according to Nomarski, comprising a light source, a polariser, a changeable Nomarski prism and an analyser. The invention is also characterised in that the light source has a narrow frequency spectrum and/or is provided with a spectral filter having a narrow frequency spectrum; and in that said microscope is provided with a phase displacement interferometry evaluation unit.