发明名称 STRUCTURE AND METHOD OF CONTROLLING SHORT-CHANNEL EFFECT OF VERY SHORT CHANNEL MOSFET
摘要 A semiconductor device comprising a gate having an approximately 0.05 mum channel length, an oxide layer below the gate, a self-aligned compensation implant below the oxide layer, a halo implant surrounding the self-aligned compensation implant below the oxide layer; and gate and drain regions on opposite sides of the halo implant and below the oxide layer.
申请公布号 US2002056873(A1) 申请公布日期 2002.05.16
申请号 US19980114502 申请日期 1998.07.13
申请人 WANN HSING-JEN 发明人 WANN HSING-JEN
分类号 H01L29/78;H01L21/336;H01L21/8234;H01L29/10;(IPC1-7):H01L29/76 主分类号 H01L29/78
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