VAPORIZER

摘要

PURPOSE: A vaporizer is provided which has a long life time by maximizing nozzle effect, thereby minimizing particle generation due to incomplete vaporization, and easily performs repairing and cleaning, thereby minimizes a down time of LDS(liquid reagent delivery system) by having a simple structure. CONSTITUTION: The vaporizer comprises a connector(30) at both ends of which female screws are formed respectively; a vaporizer body(10) which is screw connected to one end of the connector(30); a male screw end part cap(20) which is screw connected to the other end of the connector(30) so as to seal the end part of the vaporizer body(10) that is connected to the connector(30); a liquid raw material supply pipe(40) which is inserted into the male screw end part cap(20); a vapor raw material supply pipe(80) which is extended from the other end of the vaporizer body(10) so that the vapor raw material supply pipe(80) is connected to a vacuum chamber; a bypass pipe which is diverged from the vapor raw material supply pipe(80) so as to be connected to a vacuum pump; and valves(70) each of which are installed at the bypass pipe and the vapor raw material supply pipe(80) respectively.