SYSTEM FOR DELIVERING A VAPOR AND METHOD

摘要

Highly efficient conversion of a liquid (43) to a vapor can be carried out in a vessel (42) that is transparent to infrared energy by mounting an infrared lamp (46) adjacent to the vessel. The liquid absorbs light from the infrared lamp, heating the liquid. Heating can be further facilitated by immersing opaque dielectric bodies (44), such as polytetrafluoroethylene or ceramic spheres, in the liquid. The light energy from the lamp is absorbed by the dielectric bodies, energy, heating the bodies and in turn further heating the liquid in which they are immersed. The vaporized liquid can be passed to a processing chamber.