发明名称 3-D LEAD INSPECTION
摘要 A semiconductor lead inspection device includes a camera and an illlumination source for backlighting the leads of the semiconductor device to form an image in the camera. The camera and the illumination device are arranged on optical paths which alternatively pass through or are reflected by a beamsplitter. A surface is illuminated to backlight the leads and a light deflecting device is arranged for deflecting the backlit image of the semiconductor leads to form an image in the camera.
申请公布号 WO0239100(A1) 申请公布日期 2002.05.16
申请号 WO2001US23860 申请日期 2001.07.30
申请人 SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS INC. 发明人 TAN, SEOW, HOON;RAO, SREENIVAS
分类号 G01N21/956 主分类号 G01N21/956
代理机构 代理人
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