发明名称 |
Nitrous oxide purification system and process |
摘要 |
Provided are a system and method for nitrous oxide purification, wherein the nitrous oxide product for use in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide, therein; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and wherein a nitrous oxide devoid of light impurities is conveyed and converted into vapor in said vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the said first dry bed vessel for removing water and ammonia in the vapor. A third sub-system having a product tank wherein the purified nitrous oxide vapor is recondensed; a transferring manifold including a liquid pump, liquid filter and a bypass for distributing the purified nitrous oxide to holding vessels.
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申请公布号 |
US2002056289(A1) |
申请公布日期 |
2002.05.16 |
申请号 |
US20020044902 |
申请日期 |
2002.01.15 |
申请人 |
ZHOU DERONG;BORZIO JOHN P.;KEBBEKUS EARLE;MINER DAVID |
发明人 |
ZHOU DERONG;BORZIO JOHN P.;KEBBEKUS EARLE;MINER DAVID |
分类号 |
F25J1/00;B01D3/32;C01B21/22;F25J3/02;F25J3/08;(IPC1-7):F25J3/00 |
主分类号 |
F25J1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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