Semiconductor substrate conveying module in semiconductor manufacture, has mechanical connecting elements in side walls which coact with corresponding connecting element of workstation

摘要

The mechanical connecting elements (4a) of the side walls (1a-1c) which surround the substrate conveying module (1) coact with the corresponding connecting elements (4b) of the workstations (3). An Independent claim is included for a system comprising substrate conveying modules and workstations.