CALCINATION TOOL FOR ELECTRONIC PARTS

摘要

PURPOSE: To provide a calcination tool for electronic parts, which has a long life and can be produced at a low cost. CONSTITUTION: The calcination tool for electronic parts has a spray coating layer consisting of a material having low reactivity with the body to be calcined on the surface of a ceramic base body. Two or more layers are formed by spray coating on the surface of the base body so that the spray coating layers are made of different kinds of materials. Or, when the calcination tool for electronic parts has a ceramic base body, the layer in contact with the base body is formed by spray coating and the surface of the spray coating layer is formed as a thermal spray layer.