PORTABLE SURFACE SHAPE MEASURER

摘要

A portable surface shape measurer, comprising a linear guide rail, a table engaged with the guide rail movably along the guide rail, a stage engaged with the table movably in the lateral axial direction of the guide rail orthogonal to the longitudinal axis direction, a non-contact displacement sensor fixed to the stage, a first drive means for driving the table, a first coordinate detection means for detecting the longitudinal axis coordinate of the non-contact displacement sensor, a second drive means for driving the stage, a second coordinate detection means for detecting the lateral axis coordinate of the non-contact displacement sensor, a coordinate correction means for correcting the lateral axis coordinate of the non-contact displacement sensor by using the deflection of the guide rail in lateral axis direction, a support member for supporting the guide rail, and a support member positioning means for positioning the support member on a measured surface.