发明名称 Apparatus for sticking a tape onto a semiconductor wafer and method of sticking the tape
摘要 The apparatus for sticking a tape onto a semiconductor wafer comprises a winding tape roll for winding a tape wound around a tape roll, a taper roller having a diameter which is tapered or reduced toward both ends thereof, a wafer table mounting thereon a semiconductor wafer which is taken out from a wafer carrier station and positioning the wafer thereon, an orientation flat cutter and a circumferential cutter.
申请公布号 US2002056523(A1) 申请公布日期 2002.05.16
申请号 US20010975561 申请日期 2001.10.12
申请人 ISHINODA MUTSUO 发明人 ISHINODA MUTSUO
分类号 H01L21/304;B29C63/02;H01L21/00;H01L21/301;(IPC1-7):B32B31/00 主分类号 H01L21/304
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