发明名称 ELECTRONIC DEVICE, SEMICONDUCTOR DEVICE COMPRISING SUCH A DEVICE AND METHOD OF MANUFACTURING SUCH A DEVICE
摘要 The invention relates to an electronic device comprising an electronic component 2, 3, such as a SAW (=Surface Acoustic Wave) filter 2, 3 having connection areas 4, 5. The filter 2, 3 is sealed off from the environment by means of a cover 6 forming a cavity 7 above the filter 2, 3. According to the invention, the cover 6 is formed by a lacquer layer 6A which is provided, at the location of the filter 2, 3, with an opening 7' and which is covered with a photoresist layer 6B closing the opening 7' such that the cavity 7 thus formed has a thickness above zero everywhere above the filter 2, 3. This enables an accurate and stable frequency selection by means of the filter 2, 3 and allows the device according to the invention to be very compact and easy to manufacture. Thus, the device according to the invention is very suitable for use in an application such as a mobile telephone, also after integration of the device with a semiconductor device. The photoresist layer 6B and the lacquer layer 6A preferably contain further openings 8, at the location of the connection regions 4, 5, which are provided with bumps 9, preferably solder bumps 9. Preferably, the photoresist layer 6B comprises a solid foil 6B, which is solder-repellent. The invention also comprises a method of manufacturing a device according to the invention as well as a semiconductor device wherein the device according to the invention is integrated.
申请公布号 WO0239583(A1) 申请公布日期 2002.05.16
申请号 WO2001EP13022 申请日期 2001.11.06
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V.;WEEKAMP, JOHANNUS, W.;JORRITSMA, JORRIT;TIJSSEN, EDWIN, P., A., M.;DE SAMBER, MARC, A. 发明人 WEEKAMP, JOHANNUS, W.;JORRITSMA, JORRIT;TIJSSEN, EDWIN, P., A., M.;DE SAMBER, MARC, A.
分类号 H01L41/09;H01L21/60;H01L41/18;H01L41/22;H03H3/08;H03H9/02;H03H9/05;H03H9/25;H03H9/64;H05K3/28;H05K3/34 主分类号 H01L41/09
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