INTEGRATED ALIGNMENT AND CALIBRATION OF OPTICAL SYSTEM

摘要

A calibration system within an optical inspection apparatus comprising a sensor (32), lens (36), fiducial (34), and a CPU (16). The CPU is configured to receive information from the sensor (32) relating to the fiducial coordinate system and the sensor coordinate system, and the fiducials are used to determine a physical relationship between the sensor coordinates and fiducial coordinates. The calibration system has a means for calibrating the inspection system and measuring critical dimensions of an object in an accurate manner on-the-fly without additional set-up or manual calibration of the system.