| 发明名称 |
BOLOMETER MATERIAL, BOLOMETER THIN FILM, METHOD FOR MANUFACTURING BOLOMETER THIN FILM AND INFRARED DETECTING ELEMENT USING THE SAME |
| 摘要 |
A bolometer which uses a thin film of a bolometer material comprising, as a main component, an oxide represented by the formula ZyCuOx, wherein y is a number of 0 </= y </= 2, x is a number satisfying 0.5y < x </= 1.5 + 2y, and Z represents any one of one or more of alkaline earth metals; one or more of rare earth elements selected from among yttrium and lanthanoid elements; one or more of the elements belonging to the fifth and sixth periods of the Periodic Table selected from among bismuth, lead, thallium, mercury and cadmium; potassium; and sodium. A method for manufacturing the above bolometer film which comprises carrying out a sputtering using, as a target, a mixture or a composite oxide of a Cu oxide such as Cu2O, CuO or a mixture of Cu2O and CuO with an oxide of an element mentioned above as Z. The above oxide represented by the formula ZyCuOx has a temperature coefficient of resistance ( TCR ) higher than that of a conventional material and the bolometer material can be used for manufacturing a bolometer thin film having an elevated temperature coefficient of resistance ( TCR ) by a simple and easy manufacture process and thus for providing an infrared detecting element having elevated sensitivity. |
| 申请公布号 |
WO0239508(A1) |
申请公布日期 |
2002.05.16 |
| 申请号 |
WO2001JP06981 |
申请日期 |
2001.08.13 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;HIGUMA, HIROKO;MIYASHITA, SHOJI |
发明人 |
HIGUMA, HIROKO;MIYASHITA, SHOJI |
| 分类号 |
G01J5/20;(IPC1-7):H01L37/00 |
主分类号 |
G01J5/20 |
| 代理机构 |
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