| 摘要 |
PURPOSE: An apparatus for fixing a thin article is provided to prevent generation of particles by grasping the thin article in a rotating process of the thin article. CONSTITUTION: A support is formed with an upper support(1), a lower support(1'), and a screw(19) in order to fix and rotate a wafer. The support has a space room for installing a multitude of holder and a rotating plate(2). The rotating plate(2) is installed in an inside of the upper support(1) and the lower support(1'). A multitude of hole is formed in an inside of the rotating plate(2). A multitude of spring fixing portion(20,20') is formed in the rotating plate(2) and the lower support(1'). Both ends of the spring(7) are fixed by the spring fixing portion(20,20'). A multitude of pin(8) is used for supporting a thin article. The pins(8) are inserted into a hole for receiving the pins(9) formed an upper face of the upper support(1). A holder(4) is installed in a receiving section(10) for holder.
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