Method and apparatus for adjusting impedance of matching circuit

摘要

Based on a relationship between cutting-and-removing amounts for partly cutting out the stub of the pattern line and impedances of the matching circuit, a cutting-and-removing amount for adjusting the impedance to a target value is determined by simulation or by comparison operation of an impedance measured value with information stored in a database. Then, based on the determined cutting-and-removing amount, the stub of the pattern line is partly cut and removed so that the impedance is adjusted to the target value.