Annealed copper alloy electrodes for fluorine containing gas discharge lasers,申请号AU20020015318-传众专利搜索

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发明名称	Annealed copper alloy electrodes for fluorine containing gas discharge lasers
摘要
申请公布号	AU1531802(A)	申请公布日期	2002.05.15
申请号	AU20020015318	申请日期	2001.10.05
申请人	CYMER, INC.	发明人	RICHARD G. MORTON
分类号	G03F7/20;H01S3/036;H01S3/038;H01S3/041;H01S3/0979;H01S3/22;H01S3/223;H01S3/225	主分类号	G03F7/20
代理机构		代理人
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地址

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