发明名称 |
Gimbaled micro-mirror positionable by thermal actuators |
摘要 |
A micro-mechanical device including a gimbaled micro-mirror position able by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light. |
申请公布号 |
AU1344902(A) |
申请公布日期 |
2002.05.15 |
申请号 |
AU20020013449 |
申请日期 |
2001.10.04 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
BILLY L. WEAVER;MIKE E. HAMERLY;ROBERT G. SMITH |
分类号 |
B81B3/00;G02B26/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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