ARRANGEMENT ENABLING A LIQUID TO FLOW EVENLY AROUND A SURFACE OF A SAMPLE AND USE OF SAID ARRANGEMENT

摘要

The invention relates to an arrangement enabling a liquid ( 2 ) to flow evenly around a surface of a sample ( 3 ); said arrangement has a flow chamber ( 1 ) through which a liquid ( 2 ) flows via inflow and outflow pipes ( 7, 8 ). The sample ( 3 ) can be rotated about an axis of rotation by means of a rotary drive ( 5 ). A filter ( 13 ) which extends crosswise to the direction of flow of the liquid ( 2 ) and which ensures a uniform flow through the inflow and outflow pipes ( 7, 8 ) is situated in front of the inflow and outflow pipes ( 7, 8 ). The arrangement is especially suitable for depositing a homogeneous layer of a nickel/iron alloy on a silicon wafer ( 3 ). The invention relates furthermore to the use of the arrangement.