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发明名称
Small-scale structures
摘要
申请公布号
AU1073502(A)
申请公布日期
2002.05.15
申请号
AU20020010735
申请日期
2001.10.30
申请人
CAMBRIDGE UNIVERSITY TECHNICAL SERVICES LTD
发明人
PIER-JOHN ANTHONY SAZIO;CHRISTOPHER JOHN BRISTOW FORD;DOUGLAS PAUL;NEIL CLEMENT GREENHAM;ALEXANDER GILES DAVIES;PER JOHAN LUNDGREN
分类号
B82B1/00;H01L29/08;H01L29/88
主分类号
B82B1/00
代理机构
代理人
主权项
地址
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