| 发明名称 |
INORGANIC PERMEATION LAYER FOR MICRO-ELECTRIC DEVICE |
| 摘要 |
The present invention pertains to a method of, and a device created by, depositing an inorganic permeation layer on a micro-electronic device for molecular biological reactions. The permeation layer is preferably sol-gel. The sol-gel permeation layer can be created with pre-defined porosity, pore size distribution, pore morphology, and surface area. The sol-gel permeation layer may also function as the attachment layer of the micro-electric device. |
| 申请公布号 |
EP1204853(A1) |
申请公布日期 |
2002.05.15 |
| 申请号 |
EP20000951038 |
申请日期 |
2000.06.09 |
| 申请人 |
NANOGEN, INC. |
发明人 |
HAVENS, JOHN, R.;KRIHAK, MICHAEL, K.;GREEF, CHARLES, H.;RAYMOND, DANIEL, E.;HELLER, MICHAEL, J. |
| 分类号 |
G01N33/53;B01J19/00;B01L3/00;B81B1/00;B81C1/00;C07B61/00;C07H21/00;C07K1/04;C07K1/24;C12M1/00;C12Q1/68;C40B40/06;C40B40/10;C40B40/12;C40B60/14;G01N27/447;G01N33/566;G01N37/00;G11C13/02;G11C19/00;H01L21/336;H01L21/98;H01L29/78 |
主分类号 |
G01N33/53 |
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