Composition for vapor deposition, method for forming antireflection film using it, and optical element

摘要

It is an object of the invention to provide a method for producing an optical element having a multi-layered antireflection film formed on a synthetic resin substrate, in which the antireflection film formed has good heat resistance, and its heat resistance lowers little with time. The method makes it possible to form high-refraction layers within a shorter period of time, not detracting from the good physical properties intrinsic to the layers. <??>At least one high-refraction layer of the multi-layered anti-reflection film contains niobium oxide, zirconium oxide, yttrium oxide, and optionally aluminum oxide.