发明名称 PHOTOSENSITIVE ELEMENT, PHOTOSENSITIVE ELEMENT ROLL, PROCESS FOR PRODUCING RESIST PATTERN WITH THE SAME, RESIST PATTERN, SUBSTRATE WITH OVERLYING RESIST PATTERN, PROCESS FOR PRODUCING WIRING PATTERN, AND WIRING PATTERN
摘要 <p>There are disclosed a photosensitive element comprising a support film which comprises a biaxially oriented polyester film and a photosensitive resin composition layer formed on one surface of the polyester film, wherein a resin layer containing fine particles is formed on the opposite surface of the support film to which the photosensitive resin composition layer is formed, and said photosensitive resin composition comprises (A) a binder polymer having a carboxyl group, (B) a photopolymerizable compound having at least one polymerizable ethylenically unsaturated group in the molecule, and (C) a photopolymerization initiator, a photosensitive element roll, a process for the preparation of a resist pattern using the same, the resist pattern, a resist pattern-laminated substrate, a process for the preparation of a wiring pattern and the wiring pattern. <IMAGE></p>
申请公布号 EP1205802(A1) 申请公布日期 2002.05.15
申请号 EP20000939104 申请日期 2000.06.21
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 CHIBA, TATSUO;ICHIKAWA, TATSUYA
分类号 G03F7/027;G03F7/09;G03F7/11;(IPC1-7):G03F7/004;H05K3/00;G03F7/033 主分类号 G03F7/027
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