| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a chuck is not aging stabilized due to water of a cavity of the chuck even by designing the chuck, by taking the cavity of the chuck into consideration of a shrinkage of a resin generating after molding is finished or the wear of an oblique surface of a use for a long period or a shrinkage due to a compressing action, and the cavity is repaired or made by replacing the cavity each time of such a problem but its cost is not low. SOLUTION: The chuck is opened or closed by a chuck ring. The chuck comprises an oblique surface formed at a part contacted with the chuck ring of the chuck. The cavity formed at the oblique surface is formed at least at a separate member from the cavity formed at another part.
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