Method of an apparatus for obtaining neutral dissociated gas atoms

摘要

A downstream stripper includes a source of dissociated electrically neutral gas atoms derived by a plasma generator responsive to gas molecules including the atoms. The plasma generator includes a chamber responsive to RF electromagnetic fields derived by two coils on opposed sides of the chamber. The coils supply the fields to the interior of the chamber via windows on the opposed sides. The chamber includes metal, electrically grounded walls and an outlet with such walls for attracting charge particles in the plasma. The interiors of the outlet and chamber walls are lined with quartz for capturing the charge particles. The electrically neutral gas atoms have a high concentration and a very low percentage of electrically charged particles flowing with them.