| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device to enable the high efficient use of an abrasive tape and prevention of reduction of polishing capacity. SOLUTION: The polishing device comprises a polishing head body 3 on which the abrasive tape T is mounted; a support member 1 to support the polishing head body 3; and a polishing table 2 on which a material to be polished is mounted. As the abrasive tape T is brought into contact with the material to be polished placed on an installation surface 24 of the polishing table 2, the polishing head body 3 is rotated based on a support member 1 around a line, serving as an axis Z, orthogonal to the installation surface 24 of the polishing table 2. In the so formed polishing device, the abrasive tape T is mounted on the polishing head body 3 such that the contact part of the abrasive tape T brought into contact with the material to be polished installed on the polishing table 2 is positioned further radially externally than a rotary axis Z of the polishing head body 3. |
