发明名称 |
Corrugated style anode element for ion pumps |
摘要 |
An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cell are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which support a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.
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申请公布号 |
US6388385(B1) |
申请公布日期 |
2002.05.14 |
申请号 |
US20000528093 |
申请日期 |
2000.03.17 |
申请人 |
FEI COMPANY;VARIAN, INC. |
发明人 |
MCGINN JAMES B.;SPAGNOL MIRIAM |
分类号 |
H01J41/18;(IPC1-7):H01J7/18 |
主分类号 |
H01J41/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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