| 摘要 |
A structural body has an aluminum nitride sintered body, a silicon carbide film formed on a surface of the sintered body, and an intermediate layer generated between the sintered body and the silicon carbide film. The intermediate layer is mainly made of a silicon nitride. Preferably, the intermediate layer includes smaller than 5 wt % of carbon and smaller than 5 wt % of aluminum, and a thickness of the intermediate layer is greater than 0.2 mum.
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