| 摘要 |
The present invention provides a method for developing treatment, in which a developing solution is supplied to an object to be treated for performing a developing treatment, comprising the steps of supplying pure water onto a surface of said treating object for forming a pure water film on the surface of the treating object, and supplying a developing solution onto the surface of the treating object having the pure water film formed thereon in the preceding step. The particular method of the present invention permits markedly suppressing a defective development. |
