ELLIPTICAL POLARIZATION ANALYSER AND METHOD FOR ALIGNING INCIDENT ANGLE USING THE SAME

摘要

PURPOSE: An elliptical polarization analyser and method for aligning incident angle using the same are provided to furnish various incident angles using mechanical coupling without a confocal microscope or a motor and so on. CONSTITUTION: An elliptical polarization analyser(10) includes a main frame(16); a sample stage(11); a polarization part(12); and an analyser part(14). The main frame is semicircular and has a plurality of first grooves(17) formed in radial direction and a second groove(18) formed in circumferential direction. The sample stage is installed on a central area of the main frame and movable in triaxial direction. The polarization part includes a first ball and a second ball inserted in the first grooves, a third ball inserted in the second groove and a contacting device on a surface contacting with the main frame to fix the position thereof to radiate polarization. The analyser part includes a first ball and a second ball inserted in the first grooves, a third ball inserted in the second groove and the contacting device on a surface contacting with the main frame to fix the position thereof to receive light reflected by an upper surface placed on the sample stage.