发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT CHIP, BOARD AND THEIR MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor integrated circuit chip which has fine electrode pads, a semiconductor integrated circuit board in order to manufacture the fine integrated circuit chip, and manufacturing methods of the semiconductor integrated circuit chip and the semiconductor integrated circuit board. SOLUTION: A metallic column 25 consisting of conductive materials is vertically formed on an electrode pad 14 which is an I/O terminal of an integrated circuit chip 10.
申请公布号 JP2002134545(A) 申请公布日期 2002.05.10
申请号 JP20000327709 申请日期 2000.10.26
申请人 OKI ELECTRIC IND CO LTD 发明人 OGURA KEN
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L21/768;H01L21/822;H01L23/12;H01L23/485;H01L27/04 主分类号 H01L23/52
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