METHOD AND EQUIPMENT FOR HEAT TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment equipment wherein the surface of a plate-like object is parallel to a heating plate or cooling plate positioned above for every heating or cooling process. SOLUTION: The gas is made to flow between a fixed part 7a and a movable part 7b constituting a spherical bearing 7, and a support plate 8 supporting a lift pin 9 is allowed to tilt. Under this condition, the lift pin 9 is raised by a motor 4 with no plate-like object W supported, so that the upper end of the lift pin 9 pressurizes the lower surface of a cooling plate 2. The movable part 7b is fixed to the fixed part 7a by sucking, and the lift pin 9 is lowered together with the support member 8 as it is. Then the plate-like object W is placed on the lift pin 9, and the lift pin 9 is raised again so that the surface of plate-like object W approaches the cooling plate 2 for cooling process.