| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner for improving substitution efficiency with respect to an inert gas in a lighting-system container and a projection lens container and minimizing time required for substituting from an atmosphere to the inert gas. SOLUTION: The aligner applies exposure light from an exposure light source 1 to a reticle R1 via a light source lens system 2, that is a lighting optical system and projects and exposes a pattern formed on the reticle R1 onto a water W1 via a projection lens system 6 that is a projection optical system. The projection aligner comprises a container 3 for closing the optical lens system 2 and the projection lens system 6, that are arranged on the light path of exposure light from the exposure light source 1 to the reticle R1, a means for supplying a prescribed gas into the container, a vacuum source 18 for evacuating the inside of the container, a vacuum pressure controller 19 for constantly controlling the pressure inside the container, and a pressure relief valve 20 for setting the difference between the pressure inside the container and the atmospheric pressure to a prescribed value or lower.
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