| 摘要 |
PROBLEM TO BE SOLVED: To settle problems on performances such as shortage of an analyzing means, absence of a verifying function of a analysis result, a large dependence on a sample and the like in the case that an optical system automatic correction device of a charged particle beam device is applied to a focusing ion beam(FIB) device. SOLUTION: A shaft displacement, a focus position displacement, and an astigmatism are automatically corrected based on positional displacement variables among images of a scanning ion microscope(SIM) taken under various conditions set on a FIB lens, a correcting deflector, a beam limitation aperture or the like. Since an analyzing method based on the displacement variables less depends on the sample, its applicable range is enlarged in such a case that a beam current is changed, or a drift by an ion gun occurs. By adopting this positional displacement analyzing method, a device correction accuracy is improved by one digit. A reliability on the positional displacement analyzing result is verified with an extent of coincidence, which enables an unattended operation in which a wrong operation preventing flow is added.
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