SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To sufficiently enhance quality in treatment of a substrate, and also to shorten the time required for the treatment. SOLUTION: A square-rectifying plate 4 is adopted, where slits 4a are formed so that they extend in a direction orthogonal to a first treatment liquid supply pipe 2 and a second treatment liquid supply pipe 3 and also the slit pitch is set to prescribed pitch (preferably, a pitch equal to the pitch of a substrate which is the object of treatment).