METHOD FOR HYBRID DRAM CELL UTILIZING CONFINED STRAP ISOLATION
摘要
A process of forming a hybrid memory cell which is scalable to a minimum feature size, F, of about 60 nm at an operating voltage of Vblh of about 1.5 V and substantially free of floating-well effects.
申请公布号
WO0237542(A2)
申请公布日期
2002.05.10
申请号
WO2001US46921
申请日期
2001.11.05
申请人
INFINEON TECHNOLOGIES NORTH AMERICA CORP.;INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
MANDELMAN, JACK, A.;DIVAKARUNI, RAMACHANDRA;RADENS, CARL, J.;KUDELKA, STEPHAN