发明名称 Infra-red electromagnetic radiation detector includes non-cooled sensing circuit in vacuum cavity beneath transparent window
摘要 The infrared detector has a detecting circuit with a non-cooled thermal detector (4) and an associated reading circuit (2). A substrate (8) forms a vacuum cavity (10) holding thermal detector and reading circuit. A window (3) is arranged above the cavity forming a cover. A closure (12,13) hermetically seals the window on the substrate. Electrical connections are inserted into the window providing a sealed connection between the circuit and elements outside.
申请公布号 FR2816447(A1) 申请公布日期 2002.05.10
申请号 FR20000014247 申请日期 2000.11.07
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 OUVRIER BUFFET JEAN LOUIS;BISOTTO SYLVETTE;CAPLET STEPHANE
分类号 H01L21/60;H01L31/0203 主分类号 H01L21/60
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