FILM FORMING DEVICE FOR MAGNETIC RECORDING DISK

摘要

PROBLEM TO BE SOLVED: To provide a configuration to prevent the generation of particles in a protection film producing chamber where a protection film for a magnetic recording disk is produced. SOLUTION: A carbon film piled up on a exposed surface of the protection film producing chamber 6 where the carbon protection film is produced on a magnetic film is removed by a cleaning means. Oxygen gas is introduced in the protection film producing chamber 6 by a gas introduction system 62 and the cleaning means removes the carbon film through the formation of oxygen plasma P by impressing a discharge electrode 631 with a discharge power supply 633 and making discharge of oxygen gas. The discharge electrode 631 is of hollow structure and has a gas nozzle 638 at the edge of the surface opposite to a substrate 9 or in its neighborhood with an enough size to make oxygen plasma P able to enter and its exposed surface is made of carbon. The gas introduction system 62 makes gas blow off from the gas nozzle through the discharge electrode 631 and introduces it.