CAPACITOR ELEMENT AND PRODUCTION METHOD THEREFOR

摘要

A capacitor element consisting of a lower electrode, a dielectric film and an upper electrode, and a production method therefor, wherein the surface of a single-layer structure or that of at least one layer of a laminate-structure lower electrode, e.g., the surface in contact with the dielectric film of the lower electrode, is flattened by working on a material itself constituting this surface. For example, material itself shaved off a surface is buried in crystal grain boundary recesses in the surface to flatten it. Accordingly, the irregularities of the lower electrode surface in the capacitor element are eased and the dielectric film thickness is uniformed to prevent a reduction in capacity and an increase in leak current.