发明名称 MECHANISM FOR CONVEYING OBJECT TO BE PROCESSED AND PROCESSING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a mechanism for conveying an object to be processed, by which high-speed conveying can be performed without positional shift of the object to be processed. SOLUTION: The conveying mechanism 40 is provide in a relatively long common conveying area 6 to convey the thin platy object W to be processes. The conveying mechanism 40 is provided with; a guiding rail 42 provided in the longitudinal direction in the common conveying area; a moving body 44A moveable along the guiding rail; and a plurality of supporting posts 80 provided in the moving body and having engaging stages 82, 84 having L shaped cross sections and engaged with lower corners of a periphery of the object. The object is held by the engaging stages so that it can be quickly conveyed and prevented from being positionally shifted.
申请公布号 JP2002134587(A) 申请公布日期 2002.05.10
申请号 JP20000327287 申请日期 2000.10.26
申请人 TOKYO ELECTRON LTD;SHINKO ELECTRIC CO LTD 发明人 MASUOKA NOBORU
分类号 B65G49/07;B65G54/02;H01L21/304;H01L21/677;(IPC1-7):H01L21/68 主分类号 B65G49/07
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