发明名称 |
MECHANISM FOR CONVEYING OBJECT TO BE PROCESSED AND PROCESSING SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism for conveying an object to be processed, by which high-speed conveying can be performed without positional shift of the object to be processed. SOLUTION: The conveying mechanism 40 is provide in a relatively long common conveying area 6 to convey the thin platy object W to be processes. The conveying mechanism 40 is provided with; a guiding rail 42 provided in the longitudinal direction in the common conveying area; a moving body 44A moveable along the guiding rail; and a plurality of supporting posts 80 provided in the moving body and having engaging stages 82, 84 having L shaped cross sections and engaged with lower corners of a periphery of the object. The object is held by the engaging stages so that it can be quickly conveyed and prevented from being positionally shifted. |
申请公布号 |
JP2002134587(A) |
申请公布日期 |
2002.05.10 |
申请号 |
JP20000327287 |
申请日期 |
2000.10.26 |
申请人 |
TOKYO ELECTRON LTD;SHINKO ELECTRIC CO LTD |
发明人 |
MASUOKA NOBORU |
分类号 |
B65G49/07;B65G54/02;H01L21/304;H01L21/677;(IPC1-7):H01L21/68 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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