| 摘要 |
<p>A cleaned pulling room which has a plurality of single-crystal pulling machines installed therein and a plurality of work floors, and supplies clean down-floor air from the ceilings or upper portions in the vicinity thereof, characterized in that at least three work floors are provided according to a clean level required for work conducted on each work floor. Accordingly, the pulling room, having a plurality of single-crystal pulling machines installed therein, can separate a dust producing work such as dismantling/cleaning of a furnace body and in-furnace components from a work requiring a high-clean-level environment such as charging of materials into a furnace for keeping the pulling machines ready to start operating, and ensure safety of work even when pulling machines are increased in size.</p> |
