| 摘要 |
PROBLEM TO BE SOLVED: To enhance the accuracy of measuring a mark, using an interlacing type storage area sensor. SOLUTION: The mark measuring device obtains the brightness of even numbered fields and odd numbered fields of an image time-divided and stored in the even numbered fields and the odd numbered fields, obtains a constant for correcting the deviations of the brightnesses, and corrects the brightnesses of the even numbered fields and the odd numbered fields by the constant. The mark is measured by using the corrected images.
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