RU TARGET MATERIAL FOR MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To prevent the coarsening of crystal grain diameter, lowering of breaking resistibility and the increase of the generation of foreign matters and the deterioration with time that have been occurred in an conventional method even though a high purity RU target material can be obtained in the conventional method. SOLUTION: An ideal RU target material is obtained as a magnetic recording medium through decreasing significantly the generation of foreign matters and the deterioration with time at sputtering time that depends on the crystal grain diameter of the target material and in addition, maintaining the strength by making the average crystal grain diameter 100μm or smaller.