发明名称 A PROCESS FOR CONVERTING A METAL CARBIDE TO CARBON ON THE SURFACE OF THE METAL CARBIDE BY ETCHING IN HALOGENS
摘要 A process for the synthesis of carbon coatings on the surface of metal carbides, preferably SiC, by etching in a halogen-containing gaseous etchant, and optionally hydrogen gas, leading to the formation of a carbon layer on the metal carbide. The reaction is performed in gas mixtures containing about 0 % (trace) amounts to 100 % halogen-containing gaseous etchant, e.g., Cl2, and about 0 % to 99.9 % H2 (hydrogen gas) at temperatures from about 100 DEG C to about 4,000 DEG C, preferably about 800 DEG C to about 1,200 DEG C, over any time range, maintaining a pressure of preferably about one atmosphere, to about 100 atmospheres.
申请公布号 WO0116054(A3) 申请公布日期 2002.05.10
申请号 WO2000US23343 申请日期 2000.08.24
申请人 THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS 发明人 MCNALLAN, MICHAEL, J.;ERSOY, DANIEL;GOGOTSI, YURY
分类号 A61F2/00;A61F2/30;A61F2/32;A61F2/34;A61F2/36;A61F2/38;A61F2/40;A61F2/42;A61F2/46;A61L27/30;B01J3/06;B01J21/18;B01J27/22;B01J37/24;C04B35/628;C04B41/50;C04B41/53;C04B41/85;C04B41/91;F16C11/06;F16C33/04;F16C33/16;F16C33/30;(IPC1-7):C04B41/91;C04B35/565;A61L27/10;H01L21/306 主分类号 A61F2/00
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