SEMICONDUCTOR DEVICE AND METHOD OF MAKING SAME

摘要

Fabrication of silicon thin film transistors (TFT) on low-temperature plasticsubstrates using a reflective coating so that inexpensive plastic substrates may beused in place of standard glass, quartz, and silicon wafer-based substrates. The TFTcan be used in large area low cost electronics, such as flat panel displays and portable electronics such as video cameras, personal digital assistants, and cellphones.